Reakce (NPF2)3 v kapacitně vázaném plazmatu

• Title in English: Reaction of (NPF2)3 in capacitively coupled plasma
• Authors: VORÁČ Zbyněk; ALBERTI Milan; URBANČÍK Petr; JANČA Jan
• Year of publication: 2005
• Type: Article in Periodical
• Magazine / Source: ChemZi
• MU Faculty or unit: Faculty of Science
• Field: Inorganic chemistry
• Keywords: Hexafluoro-cyclo-triphosphazene; polymerization; microwave plasma; mass spectrometry
• Description: Reaction of (NPF2)3 in capacitively coupled plasma was studied. The polymer layers was studied by means LDI-TOF MS and two groups of fluorophosphazene oligomers were detected in protonised or hydrated form.

Related projects

• Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface