Publication details
Laser Ablation Time-of-Flight Mass Spectrometry (LA-TOF-MS) of “Nitrogen Doped Diamond-Like Carbon (DLN) Nano-Layers”
| Authors | |
|---|---|
| Year of publication | 2006 |
| Type | Article in Proceedings |
| Conference | Book of Abstracts SSC 2006 |
| MU Faculty or unit | |
| Citation | |
| Field | Inorganic chemistry |
| Keywords | Nitrogen-doped diamond-like carbon; Laser Ablation Time-of-Flight Mass Spectrometry |
| Description | Nitrogen-doped diamond-like carbon (N-DLC or DLN) layers were prepared by the plasma enhanced chemical vapor deposition technique from a mixture of methane, nitrogen and hexamethyldisiloxane. Laser ablation time-of-flight mass spectrometric (LA-TOF) analysis of N-DLC layers that were prepared with different gas deposition time resulted in formation of various positively and negatively singly-charged species. Carbon clusters, Si2N+, Si2NH2+, and Si3C+ species could reflect the presence of carbon-silica and nitrogen-silica chemical bonds in the structure of the N-DLC layer.LA-TOF mass spectrometry was found useful method for the characterization of DLN nano-layers. |
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