Poole–Frenkel conductivity in SiOxHyCz coatings prepared by PECVD

• Authors: FRANCLOVÁ Jana; BURŠÍKOVÁ Vilma
• Year of publication: 2006
• Type: Article in Periodical
• Magazine / Source: Czechoslovak journal of physics
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Conductivity of thin films; Frenkel-Poole
• Description: The aim of the present work is to investigate the electrical properties of SiOxHyCz coatings prepared by PECVD from mixtures of hexamethyldisiloxane(HMDSO)and oxygen under various deposition conditions. VA characteristics of thin films were measured under various temperatures.

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