Deposition of protective couatings in RF organosilicon discharges

• Authors: ZAJÍČKOVÁ Lenka; BURŠÍKOVÁ Vilma; FRANTA Daniel; KUČEROVÁ Zuzana; BOUSQUET Angelique; GOULLET Antoine; GRANIER Agnes
• Year of publication: 2006
• Type: Article in Proceedings
• Conference: In Abstracts of Invited Lectures and Contributed Papers, 18th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: deposition-organosilicon-discharge
• Description: The aim of the present paer was to study the deposition of protective coatings in RF organosilicon discharges.

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