Publication details
Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment
| Authors | |
|---|---|
| Year of publication | 2008 |
| Type | Article in Periodical |
| Magazine / Source | J. Appl. Crystallography |
| MU Faculty or unit | |
| Citation | |
| Web | http://scripts.iucr.org/cgi-bin/paper?he5386 |
| Field | Solid matter physics and magnetism |
| Keywords | x-ray reflectometry; round robin; layer structures |
| Description | X-ray reflectometry (XRR) is a well established technique to evaluate quantitatively electron density, thickness and roughness of thin layers. In this paper, results of the first world-wide XRR round-robin experiment, involving 20 laboratories, are presented and discussed. The round-robin experiment was performed within the framework of the VAMAS Project "X-ray reflectivity measurements for evaluation of thin films and multilayers", the aim of which is to produce a good practice manual for XRR. The reproducibility of measurements obtained using different equipment has been investigated. The influence of the fitting of the experimental data was shown to be non-negligible compared with the experimental factors. The dynamic intensity range proves to be an important parameter for obtaining a good quality measurement. |
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