Publication details

Laboratoř polovodičů - čisté prostory pro křemíkovou technologii na MU

Title in English Clean room laboratory for silicon device technology at Masaryk University
Authors

MIKULÍK Petr

Year of publication 2007
Type R&D Presentation
MU Faculty or unit

Faculty of Science

Citation
Description Presentation of the newly created Clean room laboratory for silicon device technology at Masaryk University, which has been opened in 2007.
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