Plasma deposition of doped Diamond-like carbon nano layers. Process modeling and prediction using Artificial Neural Networks

• Authors: HAVEL Josef; BURŠÍKOVÁ Vilma; JANČA Jan
• Year of publication: 2007
• Type: Article in Proceedings
• Conference: Nanotechnologia analitica
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Artificial Neural Networks;DLC
• Description: Plasma deposition of doped Diamond-like carbon nano layers. Process modeling and prediction using Artificial Neural Networks

Related projects

• Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
• Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges