Publication details
Studying an influence of a nucleation phase on nanocrystalline diamond film properties
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Periodical |
| Magazine / Source | Acta Metallurgica Slovaca |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | nanokrystalline diamond; plasma enhanced CVD; bias enhanced nucleation; hardness |
| Description | In the present paper we studied influence of a nucleation phase on nanocrystalline diamond film properties. We determined the mechanical and optical properties of the prepared samples. The surface was studied using AFM and HRSEM techniques. |
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