Publication details

Measurement of ions in H2 - N2 capacitively coupled discharge

Authors

DVOŘÁK Pavel JANČA Jan

Year of publication 2007
Type Article in Proceedings
Conference Proceedings of XXVIII International Conference on Phenomena in Ionized Gases
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords ions; plasma ; capacitively coupled; hydrogen; nitrogen
Description Neutral molecules and especially positive ions and their energy distributions were measured in low-pressure (ca 4 Pa) high frequency (13,56 MHz) capacitively coupled discharge ignited in the mixtures of hydrogen and nitrogen. Especially, the hydrogen-rich mixtures were investigated. Firstly, the energy dependence of the spectrometer was calculated and the ion energy distributions were corrected. The dominant ions were H3+ and HN2+. Ions without hydrogen (N2+ and N+) were significant only at low hydrogen concentration (less than 10%). Also a high amount of ions NH4+ was detected. The nitrogen addition caused a quite steep decrease of the dominant hydrogen ion H3+. Further, an unusual behaviour of NH4+ and H+ was observed. Concerning creation of neutral stable molecules, only a small amount of ammonia was detected.
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