Publication details
Deposition of Diamond-Like Carbon by Gaseous Thermionic Vacuum Arc Method
| Authors | |
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| Year of publication | 2007 |
| Type | R&D Presentation |
| MU Faculty or unit | |
| Citation | |
| Description | The Thermionic Vacuum Arc (TVA) plasma is a very powerful technique capable of producing impurity free dense films using solids as precursor. A large range of metals were successfully deposited using this technique. The use of TVA for the synthesis of DLC is at the beginning. Thermionic Vacuum Arc (TVA) in vacuum conditions can generate intense plasma in the vapors of the evaporating anode material. Practically, any solid material can be evaporated. Our team examined the possibility to put in operation G-TVA as a new technology able to use as input material various type of gases or vapors for thin film deposition. The extension of Thermionic Vacuum Arc technology to coatings using gases or evaporable liquids instead of solid materials is of great interest. The composition, adherence and morphology of the films deposited using this new technique were investigated. The DLC films were found to be made of hydrogenated amorphous carbon with relatively high sp3 content, extremely adherent and smooth. |
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