Publication details
Optical quantities of rough films calculated by Rayleigh-Rice theory
| Authors | |
|---|---|
| Year of publication | 2008 |
| Type | Article in Periodical |
| Magazine / Source | physica status solidi (c) |
| MU Faculty or unit | |
| Citation | |
| Field | Optics, masers and lasers |
| Keywords | thin-films; rough film; ellipsometry; spectrophotometry |
| Description | Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy. |
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