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Publication details
Influence of N2 and CH4 on depositon rate of boron based thin films prepared by magnetron sputtering
Authors | |
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Year of publication | 2008 |
Type | Article in Periodical |
Magazine / Source | Chemické listy |
MU Faculty or unit | |
Citation | |
Web | http://www.chemicke-listy.cz/ojs3/index.php/chemicke-listy/article/view/4322/4267 |
Field | Plasma physics |
Keywords | hysteresis; reactive sputtering; hybrid deposition process |
Description | The paper study deposition rate of boron based thin films prepared by means of hybrid PVD-PECVD process and derive conclusions about process behaviour. Paper, interdisciplinary study of plasma physics |
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