Publication details

Influence of N2 and CH4 on depositon rate of boron based thin films prepared by magnetron sputtering

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Authors

ELIÁŠ Marek SOUČEK Pavel VAŠINA Petr

Year of publication 2008
Type Article in Periodical
Magazine / Source Chemické listy
MU Faculty or unit

Faculty of Science

Citation
Web http://www.chemicke-listy.cz/ojs3/index.php/chemicke-listy/article/view/4322/4267
Field Plasma physics
Keywords hysteresis; reactive sputtering; hybrid deposition process
Description The paper study deposition rate of boron based thin films prepared by means of hybrid PVD-PECVD process and derive conclusions about process behaviour. Paper, interdisciplinary study of plasma physics
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