Radial Structure of RF Discharge in Neon

• Authors: NAVRÁTIL Zdeněk; TRUNEC David; DVOŘÁK Pavel
• Year of publication: 2008
• Type: Article in Proceedings
• Conference: 2nd Central European Symposium on Plasma Chemistry - Book of Extended Abstracts
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: plasma; capacitive; neone; discharge; optical emmision spectroscopy
• Description: Radial structure of low-pressure capacitive RF (13.56 MHz) discharge ignited in neon was studied by means of optical emmision spectroscopy.

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