Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings

• Authors: BURSIKOVA Vilma; STAHEL Pavel; SOBOTA Jaroslav; GROSSMAN Jan; FORT Tomas; BOCHNICEK Zdenek; KLAPETEK Petr; BURSIK Jiri; PERINA Vratislav
• Year of publication: 2008
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: The thermomechanical stability of diamond-like protective (DLC) films play a crucial role for their technological application and its study is of great importance. The main disadvantages of amorphous hydrogenated carbon (a-C:H) films prepared using PECVD are their low thermomechanical stability (due to hydrogen loss and graphitization at temperatures exceeding 300 C). After achieving this temperature the thermal degradation process starts due to the graphitization caused by hydrogen losses.

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