Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges

• Authors: BURSIKOVA Vilma; PERINA Vratislav; SOBOTA Jaroslav; GROSSMAN Jan; KLAPETEK Petr; BURSIK Jiri; FRANTA Daniel; OHLIDAL Ivan; ZAJICKOVA Lenka; HAVEL Josef; JANCA Jan
• Year of publication: 2008
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: Nanostructured diamond-like carbon coatings with various doping (Si, O, N) were deposited on several different substrate materials (silicon, glass, polycarbonate and steel) in single (13.56 MHz) and dual capacitive r.f. discharges. The aim of the present work was to compare the properties of NDLC films prepared in single and dual-frequency capacitive plasmas (DFCCP). The objective of our study was to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven substrate surfaces and significant lowering of the internal stress in films.

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