Publication details

Interdiffusion in SiGe alloys with Ge contents of 25% and 50% studied by x-ray reflectivity

Authors

MEDUŇA Mojmír NOVÁK Jiří BAUER Günther FALUB Claudiu GRÜTZMACHER Detlev

Year of publication 2008
Type Article in Periodical
Magazine / Source Physica stat.sol.(a)
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords interdiffusion; x-ray diffraction; multilayers
Description We have investigated SiGe/Si multilayers annealed in-situ at temperatures in the range 600-700 C by x-ray diffraction.
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