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Publication details
Interdiffusion in SiGe alloys with Ge contents of 25% and 50% studied by x-ray reflectivity
Authors | |
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Year of publication | 2008 |
Type | Article in Periodical |
Magazine / Source | Physica stat.sol.(a) |
MU Faculty or unit | |
Citation | |
Field | Solid matter physics and magnetism |
Keywords | interdiffusion; x-ray diffraction; multilayers |
Description | We have investigated SiGe/Si multilayers annealed in-situ at temperatures in the range 600-700 C by x-ray diffraction. |
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