Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process

• Authors: VAŠINA Petr; DVOŘÁK Pavel
• Year of publication: 2009
• Type: Article in Proceedings
• Conference: Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: reactive sputtering
• Description: Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process, proceeding

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