Publication details

Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives

Authors

LOSURDO Maria HEMZAL Dušan BERGMAIR Michael HUMLÍČEK Josef BRUNO Giovanni CATELLAN D. COBET C. DE MARTINO A. FLEISCHER K. DOHCEVIC-MITROVIC Z. ESSER N. GAILLET M. GAJIC R. HEMZAL Dušan HINGERL K. HUMLÍČEK Josef OSSIKOVSKI R. POPOVIC Z.V. SAXL O.

Year of publication 2009
Type Article in Periodical
Magazine / Source Journal of Nanoparticle Research
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Spectroscopic ellipsometry; Polarimetry; Nanomaterials; Nanoparticles; Thin films; Optical characterization; Nanometrology.
Description This paper discusses the fundamentals, applications, potential, limitations, and future perspectives of polarized light reflection techniques for the characterization of materials and related systems and devices at the nanoscale. These techniques include spectroscopic ellipsometry, polarimetry, and reflectance anisotropy. We give an overview of the various ellipsometry strategies for the measurement and analysis of nanometric films, metal nanoparticles and nanowires, semiconductor nanocrystals, and submicron periodic structures. We show that ellipsometry is capable of more than the determination of thickness and optical properties, and it can be exploited to gain information about process control, This paper discusses the fundamentals, applications, potential, limitations, and future perspectives of polarized light reflection techniques for the characterization of materials and related systems and devices at the nanoscale.
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