Publication details
Influence on surface morphology by plasma-surface interaction between Al film and atmospheric pressure DCSBD plasma
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| Year of publication | 2010 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | The results gave us additional information about the influence to the aluminium surface driven by DCSBD plasma in air. The effect of plasma treatment on the aluminium surface crucially depends on the time and input plasma power. Generally, the features of the plasma-surface interaction could be presented as follows: i) at first time, DCSBD plasma cleans the aluminium surface from contamination and etchs the native oxide layer which can be clearly seen by decreasing if the size of aluminium grains on AFM images; ii) further increase of the treatment will lead to oxide layer deposition. |
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