Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions

• Authors: SCHMIDTOVÁ Tereza; VAŠINA Petr; SOUČEK Pavel
• Year of publication: 2010
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions. No hysteresis effect was observed and modelled.

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