Publication details
Výuková laboratoř technologie polovodičů na Masarykově univerzitě
| Title in English | Semiconductor Technology Laboratory for Teaching Purposes at Masaryk University |
|---|---|
| Authors | |
| Year of publication | 2011 |
| Type | Article in Proceedings |
| Conference | XXIX International Colloquium on the Management of Educational Process : proceedings of abstracts and electronic versions of reviewed contributions on CD-ROM |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | teaching laboratory; cleanroom; semiconductors |
| Description | Semiconductor Technology Laboratory at Masaryk University is intended primarily for teaching purposes in relation to the theoretical lectures on physics and microelectronics, which take place not only at MU (faculty of science and teaching), but also at other Czech universities cooperating. Students gain practical skills in the preparation and measurement of semiconductor components (resistors, capacitors, diodes) on 100 mm silicon plate silicon process technology (photolithography, oxidation, diffusion, etching, measurement)in clean areas. Practice in the laboratory significantly broaden students' view of work in the lab corresponding to modern industry standards, high-end technology. Clean rooms are used by companies in areas such as electronics, optics, sample preparation and analysis, metrology and pharmacy. |