Informace o publikaci
Deposition of Zn-containing films
| Autoři | |
|---|---|
| Rok publikování | 2013 |
| Druh | Konferenční abstrakty |
| Fakulta / Pracoviště MU | |
| Citace | |
| Popis | The aim of this work was depositing Zn-containing films using the atmospheric pressure plasma jet “kINPen’09”. In our work preliminary experiments of Zn deposition on the Si substrate in water solutions were done. Solutions of Zn(NO3)2 * 6H2O salt in water were used. A “white” colored film was achieved after the 30 s of treatment time. The deposited film profiles were obtained with the help of profilometer. The variation of the initial solution concentration and the deposition time lead to deposition of films with different film thicknesses. |