Informace o publikaci
Temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge
| Autoři | |
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| Rok publikování | 2015 |
| Druh | Konferenční abstrakty |
| Fakulta / Pracoviště MU | |
| Citace | |
| Popis | Number densities of sputtered Ti atoms and ions in their ground levels were determined by developed technique based on effective branching fractions. Densities were determined for single pulse,sequence of pulses and after the end of the pulse. |
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