Informace o publikaci
Deposition of thin zinc films by atmospheric pressure plasma jet in aqueous media
| Autoři | |
|---|---|
| Rok publikování | 2016 |
| Druh | Článek ve sborníku |
| Konference | Hakone XV: International Symposium of High Pressure low Temperature Plasma Chemistry |
| Fakulta / Pracoviště MU | |
| Citace | |
| Obor | Fyzika plazmatu a výboje v plynech |
| Klíčová slova | atmospheric plasma jet; thin film deposition; zinc |
| Popis | Argon plasma jet was operated at atmospheric pressure in contact with aqueous solution of a zinc salt in order to deposit thin films on silicon substrates immersed in the liquid. The thickness of the films was determined by a profilometer while the chemical composition was analysed by XPS technique. The experiments revealed the importance of the submersion depth of the substrate which strongly affects the energy and particle influx. |
| Související projekty: |