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Informace o publikaci
Deposition of thin zinc films by atmospheric pressure plasma jet in aqueous media
Autoři | |
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Rok publikování | 2016 |
Druh | Článek ve sborníku |
Konference | Hakone XV: International Symposium of High Pressure low Temperature Plasma Chemistry |
Fakulta / Pracoviště MU | |
Citace | |
Obor | Fyzika plazmatu a výboje v plynech |
Klíčová slova | atmospheric plasma jet; thin film deposition; zinc |
Popis | Argon plasma jet was operated at atmospheric pressure in contact with aqueous solution of a zinc salt in order to deposit thin films on silicon substrates immersed in the liquid. The thickness of the films was determined by a profilometer while the chemical composition was analysed by XPS technique. The experiments revealed the importance of the submersion depth of the substrate which strongly affects the energy and particle influx. |
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