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Informace o publikaci
Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD
Autoři | |
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Rok publikování | 1998 |
Druh | Článek ve sborníku |
Konference | 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma |
Fakulta / Pracoviště MU | |
Citace | |
Obor | Fyzika plazmatu a výboje v plynech |
Klíčová slova | carbon films; deposition; PECVD |
Popis | Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD |