Informace o publikaci
Diamond-Like Carbon film for protective use on glass and polymer surfaces
| Autoři | |
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| Rok publikování | 2010 |
| Druh | Konferenční abstrakty |
| Fakulta / Pracoviště MU | |
| Citace | |
| Popis | Amorphous hydrogenated carbon films can be used, besides tribological applications for optical applications. It can include antireflective coatings, photosensitive materials, scratch resistant glass and polymer surfaces. The optical properties are crucial parameters for these applications, especially possible tuning of refractive index and decrease of absorption in visible. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge at 13.56 MHz in the mixture of methane and hydrogen on silicon and glass substrates. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films. . The optical properties of the films were investigated using UV-VIS reflectometry and ellipsometry. Mechanical tests, in form of depth sensing indentation, were also performed. Acknowledgement: This research has been supported by Ministry of Education, under project MSM 0021622411, grant agency GACR No. 104/09/H080 |
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