Mgr. Matej Fekete, Ph.D.

Researcher II, Deposition of Thin films and Nanostructures

office: pav. 06/02025
Kotlářská 267/2
611 37 Brno

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phone:	+420 549 49 4176
e‑mail:

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Basic information

Type

Total number of publications: 47

2020

Behaviour of spokes in reactive HiPIMS

KLEIN Peter HNILICA Jaroslav FEKETE Matej ŠLAPANSKÁ Marta VAŠINA Petr

Conference abstract

Year: 2020, type: Conference abstract
Effect of nitrogen on sputtered species number densities evolution in reactive HiPIMS

BERNÁTOVÁ Katarína FEKETE Matej KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2020, type: Conference abstract
Evolution of ionization fraction of sputtered species in standard, multi-pulse and reactive HiPIMS

VAŠINA Petr FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav

Conference abstract

Year: 2020, type: Conference abstract
Influence of sputtered species ionisation on the hysteresis behaviour of reactive HiPIMS with oxygen admixture

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Article in Periodical

Plasma Sources Science and Technology, year: 2020, volume: 29, edition: 2, DOI
Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS

BERNÁTOVÁ Katarína FEKETE Matej KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Article in Periodical

Plasma Sources Science and Technology, year: 2020, volume: 29, edition: 5, DOI
Ionised density fraction of sputtered species in HiPIMS discharge excited in argon/acetylene gas mixture

FEKETE Matej BERNÁTOVÁ Katarína HNILICA Jaroslav SOUČEK Pavel KLEIN Peter VAŠINA Petr

Conference abstract

Year: 2020, type: Conference abstract

2019

Evolution of discharge parameters and sputtered species ionization in reactive HiPIMS with oxygen, nitrogen and acetylene

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Article in Periodical

Plasma Sources Science and Technology, year: 2019, volume: 28, edition: 2, DOI
HARD AND FRACTURE RESISTANT METAL-BORON-CARBON BASED COATINGS DEPOSITED BY INDUSTRIAL SPUTTERING SYSTEM

VAŠINA Petr KROKER Michael MATEJ Pavol FEKETE Matej ZÁBRANSKÝ Lukáš SOUČEK Pavel MIRZAEI Saeed ALISHAHI Mostafa BURŠÍKOVÁ Vilma SOCHORA Vjačeslav

Conference abstract

Year: 2019, type: Conference abstract
On ionization fraction of sputtered species

BERNÁTOVÁ Katarína FEKETE Matej KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2019, type: Conference abstract
On the origin of multilayered structure of W B C coatings prepared by non reactive magnetron sputtering from a single segmented target

KROKER Michael SOUČEK Pavel FEKETE Matej ZIKÁN Petr OBRUSNÍK Adam CZIGÁNY Zsolt BALÁZSI Katalin WEISS Zdeněk VAŠINA Petr

Conference abstract

Year: 2019, type: Conference abstract