Mgr. Matej Fekete, Ph.D.

Researcher II, Deposition of Thin films and Nanostructures

office: pav. 06/02025
Kotlářská 267/2
611 37 Brno

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phone:	+420 549 49 4176
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Basic information

Type

Total number of publications: 47

2017

Evolution of Titanium Atom and Ion Density in Reactive HiPIMS - Impact on Hysteresis Curve Shape

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2017, type: Conference abstract
Impact of Sputtered Species Ionization on Hysteresis Curve Shape – Model and Experiment

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2017, type: Conference abstract
Spokes occurrence in HiPIMS discharge at different magnetic field strengths

HNILICA Jaroslav ŠLAPANSKÁ Marta KLEIN Peter FEKETE Matej VAŠINA Petr

Conference abstract

Year: 2017, type: Conference abstract
Temporal evolution of Ti sputtered species number densities in multi-pulse HiPIMS process

FEKETE Matej HNILICA Jaroslav SOUČEK Pavel ZÁBRANSKÝ Lukáš VAŠINA Petr

Conference abstract

Year: 2017, type: Conference abstract
Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS

FEKETE Matej HNILICA Jaroslav VITELARU Catalin MINEA Tiberiu VAŠINA Petr

Article in Periodical

Journal of Physics D: Applied Physics, year: 2017, volume: 50, edition: 36, DOI
Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2017, type: Conference abstract

2016

Development of deposition process for growth of titanium/carbon coatings at laborato ry and industrial scale

VAŠINA Petr SCHMIDTOVÁ Tereza SOUČEK Pavel FEKETE Matej

Conference abstract

Year: 2016, type: Conference abstract
Time resolved study of Ti sputtered species number densities in multi-pulse HiPIMS discharge

FEKETE Matej HNILICA Jaroslav VITELARU Catalin MINEA Tiberiu VAŠINA Petr

Conference abstract

Year: 2016, type: Conference abstract

2015

Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy

VAŠINA Petr FEKETE Matej HNILICA Jaroslav KLEIN Peter DOSOUDILOVÁ Lenka DVOŘÁK Pavel NAVRÁTIL Zdeněk

Article in Periodical

Plasma Sources Science and Technology, year: 2015, volume: 24, edition: 6, DOI
Effect of pulse off time on temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge

FEKETE Matej HNILICA Jaroslav VAŠINA Petr

Article in Proceedings

Potential Application of Plasma and Nanomaterials 2015, year: 2015