Mgr. Jiří Vohánka, Ph.D.

2020

• Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials

  VOHÁNKA Jiří FRANTA Daniel ČERMÁK Martin HOMOLA Vojtěch BURŠÍKOVÁ Vilma OHLÍDAL Ivan

  Article in Periodical

  Optics Express, year: 2020, volume: 28, edition: 4, DOI

• Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films

  OHLÍDAL Ivan VOHÁNKA Jiří BURŠÍKOVÁ Vilma ŠULC Václav ŠUSTEK Štěpán OHLÍDAL Miloslav

  Article in Periodical

  Optics Express, year: 2020, volume: 28, edition: 24, DOI

• Optical quantities of a multilayer system with randomly rough boundaries and uniaxial anisotropic media calculated using the Rayleigh-Rice theory and Yeh matrix formalism

  ČERMÁK Martin VOHÁNKA Jiří FRANTA Daniel OHLÍDAL Ivan

  Article in Periodical

  Physica Scripta, year: 2020, volume: 95, edition: 9, DOI

• Spectroscopic ellipsometry of inhomogeneous thin films exhibiting thickness non-uniformity and transition layers

  OHLÍDAL Ivan VOHÁNKA Jiří BURŠÍKOVÁ Vilma FRANTA Daniel ČERMÁK Martin

  Article in Periodical

  Optics Express, year: 2020, volume: 28, edition: 1, DOI

2019

• Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films

  OHLÍDAL Ivan VOHÁNKA Jiří FRANTA Daniel ČERMÁK Martin ŽENÍŠEK Jaroslav VAŠINA Petr

  Article in Periodical

  Journal of Electrical Engineering, year: 2019, volume: 70, edition: 7, DOI

• Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model

  OHLÍDAL Ivan VOHÁNKA Jiří MISTRÍK Jan ČERMÁK Martin VIŽĎA František FRANTA Daniel

  Article in Periodical

  Thin Solid Films, year: 2019, volume: 692, edition: 31 December 2019, DOI

• Combination of spectroscopic ellipsometry and spectroscopic reflectometry with including light scattering in the optical characterization of randomly rough silicon surfaces covered by native oxide layers

  OHLÍDAL Ivan VOHÁNKA Jiří ČERMÁK Martin FRANTA Daniel

  Article in Periodical

  Surface Topography: Metrology and Properties, year: 2019, volume: 7, edition: 4, DOI

• Efficient method to calculate the optical quantities of multi-layer systems with randomly rough boundaries using the Rayleigh Rice theory

  VOHÁNKA Jiří ČERMÁK Martin FRANTA Daniel OHLÍDAL Ivan

  Article in Periodical

  Physica Scripta, year: 2019, volume: 94, edition: 4, DOI

• Evaluation of the Dawson function and its antiderivative needed for the Gaussian broadening of piecewise polynomial functions

  VOHÁNKA Jiří NEČAS David FRANTA Daniel

  Article in Periodical

  Journal of Vacuum Science & Technology B, year: 2019, volume: 37, edition: 6, DOI

• Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

  OHLÍDAL Ivan VOHÁNKA Jiří BURŠÍKOVÁ Vilma ŽENÍŠEK Jaroslav VAŠINA Petr ČERMÁK Martin FRANTA Daniel

  Article in Periodical

  Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, year: 2019, volume: 37, edition: 6, DOI