Publication details
Evolution of sputtered species densities in HiPIMS process with acetylene gas
| Authors | |
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| Year of publication | 2017 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | We report the effect of increasing the mass flow rate of the acetylene gas on the sputtered Ti atom and ion ground state number densities using the spectroscopic method based on effective branching fractions in HiPIMS and DCMS process. |
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