Publication details

Functional nano-structuring of thin silicon nitride membranes

Authors

MATĚJKA Milan KRÁTKÝ Stanislav ŘIHÁČEK Tomáš KNÁPEK Alexandr KOLAŘÍK Vladimír

Year of publication 2020
Type Article in Periodical
Magazine / Source Journal of Electrical Engineering
Citation
web https://sciendo.com/article/10.2478/jee-2020-0019
Doi http://dx.doi.org/10.2478/jee-2020-0019
Keywords membrane, nano optical device, electron optics, electron beam lithography, silicon nitride, reactive ion etching, silicon etching, microfabrication

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