Publication details
Functional nano-structuring of thin silicon nitride membranes
| Authors | |
|---|---|
| Year of publication | 2020 |
| Type | Article in Periodical |
| Magazine / Source | Journal of Electrical Engineering |
| Citation | |
| web | https://sciendo.com/article/10.2478/jee-2020-0019 |
| Doi | https://doi.org/10.2478/jee-2020-0019 |
| Keywords | membrane, nano optical device, electron optics, electron beam lithography, silicon nitride, reactive ion etching, silicon etching, microfabrication |