Informace o publikaci
Functional nano-structuring of thin silicon nitride membranes
| Autoři | |
|---|---|
| Rok publikování | 2020 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | Journal of Electrical Engineering |
| Citace | |
| www | https://sciendo.com/article/10.2478/jee-2020-0019 |
| Doi | http://dx.doi.org/10.2478/jee-2020-0019 |
| Klíčová slova | membrane, nano optical device, electron optics, electron beam lithography, silicon nitride, reactive ion etching, silicon etching, microfabrication |