Diagnostics of reactive magnetron sputtering

• Authors: VAŠINA Petr; DVOŘÁK Pavel; SCHMIDTOVÁ Tereza; BURŠÍKOVÁ Vilma; ŽEMLIČKA Radek
• Year of publication: 2010
• MU Faculty or unit: Faculty of Science
• Description: Monitoring of reactive magnetron sputtering and thin film deposition/etching by means of higher harmonic frequencies.

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