Publication details

Controlling the plasmonic properties of titanium nitride thin films by radiofrequency substrate biasing in magnetron sputtering

Authors

MASCARETTI Luca BARMAN Tapan MÜNZ Filip BRICCHI Beatrice Roberta

Year of publication 2021
Type Article in Periodical
Magazine / Source Applied Surface Science
MU Faculty or unit

Faculty of Science

Citation
Doi http://dx.doi.org/10.1016/j.apsusc.2021.149543
Keywords Titanium nitride thin films,Magnetron sputtering,Plasmonics,Spectroscopic ellipsometry,Electrical resistivity
Description We report the effect of radiofrequency (RF) substrate biasing during the sputtering process on the structural, optical and electrical properties of TiN films. We employ spectroscopic ellipsometry as a sensible characterization method and we show that a moderate RF power, despite reducing the grain size, allows to achieve optimal plasmonic quality factors and a low resistivity.

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