Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture

• Authors: JANČA Jan; KRYŠTOF P.; NAVRÁTIL Karel; BOCHNÍČEK Zdeněk; NĚMEC Petr
• Year of publication: 1995
• Type: Article in Periodical
• Magazine / Source: Acta Physica Univesitatis Comenianae
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics

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