Influence of deposition parameters on mechanical properties of plasma deposited silicon oxide films on polycarbonates

• Authors: BURŠÍKOVÁ Vilma; ZAJÍČKOVÁ Lenka; JANČA Jan
• Year of publication: 1997
• Type: Article in Proceedings
• Conference: WDS97
• MU Faculty or unit: Faculty of Science
• Citation: BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Influence of deposition parameters on mechanical properties of plasma deposited silicon oxide films on polycarbonates. In WDS97. Prague: Charles University, Prague, 1997, p. 310-315.
• Field: Plasma physics

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