Publication details
Ellipsometry of thin films
| Authors | |
|---|---|
| Year of publication | 1998 |
| Type | Article in Periodical |
| Magazine / Source | Acta Physica Slovaca |
| MU Faculty or unit | |
| Citation | |
| web | http://hydra.physics.muni.cz/~franta/bib/APS48_459.html |
| Field | Solid matter physics and magnetism |
| Description | In this paper a brief review of ellipsometric methods is presented for analyzing thin films. Examples of using these methods will be introduced as well. By means of results obtained using the ellipsometric methods introduced their practical meaning will be illustrated. It will be shown that the ellipsometric method can be tilized for analyzing single layers and multilayer systems in it successful way. |
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