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Publication details
Determination of Zr and Ti in 3-micrometers-thick ZrTiN ceramic coatings using laser ablation inductively coupled plasma atomic emission spectrometry
Authors | |
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Year of publication | 1997 |
Type | Article in Periodical |
Magazine / Source | Applied Spectroscopy |
MU Faculty or unit | |
Citation | |
Field | Analytic chemistry |
Keywords | Atomic emission spectrometry; inductively coupled plasma; UV laser ablation; Coating analysis; Nitride ceramic coatings |
Description | Analysis of 3-mu m-thick ZrN, TIN, and ZrTiN ceramic coatings on a high-speed steel substrate by laser ablation inductively coupled plasma atomic emission spectrometry (LA-ICP-AES) is described, A Nd:YAG laser was used in the Q-switched mode and operated at 355 nm and 5 mJ, Ablation patterns were obtained on the target surface by moving the ablation chamber with respect to the laser beam by means of an X-Y translator, Control of the depth of penetration was obtained by successively performing a limited number of cycles. Transient signals were obtained and their peak areas were used for the construction of calibration graphs based on the concentrations determined by energy-dispersive X-ray (EDX) analysis, An erosion rate of 0.1 mu m per cycle was observed, Crater shape and depth, temporal behavior, and reproducibility of the signals are described. |