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FV0343AR – optický prvek s AR pokrytím pro λ = 343 nm, R < 0,2 %, AOI = 0° - 5°, LIDT fluence > 0,3 J/cm2 pro pulsy 900 fs
Title in English | FV0343AR – optical element with AR coating for ? = 343nm, R < 0.2%, AOI = 0° - 5°, LIDT fluence > 0,3 J/cm2 for 900fs pulses |
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Authors | |
Year of publication | 2023 |
MU Faculty or unit | |
Description | Laser-resistant durable antireflective coating on witness glass Corning HPFS 7980 (in ArF grade quality) coated with layers combining HfO2/SiO2 evaporation technology using an electron gun with plasma assistance. The LIDT laser induced damage threshold was determined to be > 0.65 J/cm2 for a pulsed laser ? = 343 nm, pulse width 900 fs and repetition rate 1000 Hz, certified to ISO 21254-2. |
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