Characterization of CNx/SiOy Films Prepared by the Inductively Coupled RF Discharge

• Authors: ELIÁŠ Marek; ZAJÍČKOVÁ Lenka; BURŠÍKOVÁ Vilma; JANČA Jan
• Year of publication: 2000
• Type: Article in Periodical
• Magazine / Source: Czechoslovak Journal of Physics
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Description: Characterization of CNx/SiOy thin films prepared in the inductively coupled radio-frequency discharge.

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