Plasmachemical Deposition of Thin Films

• Authors: JANČA Jan; ZAJÍČKOVÁ Lenka
• Year of publication: 2000
• Type: Article in Proceedings
• Conference: 4th Czech-Russian Seminar on Electrophysical and Thermophysical Processes in Low-Temperature Plasma
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: plasma chemical deposition; Thin Films. hard films; plasma polymers; diamond-like
• Description: PECVD deposition of thin films in RF and MW plasma. Hard diamond-like carbon thin films. Transparent SiOx thin films. Polycrystalline diamond.

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