Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition

• Authors: BURŠÍKOVÁ Vilma; ZAJÍČKOVÁ Lenka; NAVRÁTIL Vladislav; PRYČKOVÁ Jana; SUBEDI Deepak Prasad; JANČA Jan
• Year of publication: 2001
• Type: Article in Proceedings
• Conference: Proceedings of 13th Symposium on Application of Plasma Processes
• MU Faculty or unit: Faculty of Science
• Citation: BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Vladislav NAVRÁTIL, Jana PRYČKOVÁ, Deepak Prasad SUBEDI and Jan JANČA. Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition. In Proceedings of 13th Symposium on Application of Plasma Processes. Bratislava (Slovakia): Dept. of Plasma Physics & Inst. of Physics, Comenius University Bratislava (Slovakia), 2001, p. 77-78. ISBN 80-223-1573-7.
• Field: Plasma physics
• Keywords: Plasma Physics; Thin Solid Films
• Description: The modification of some properties of diamond-like carbon thin films by addition of hexametyldisiloxan was studied.Especially mechanical properties (microhardness) were studied.

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