Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition

• Authors: BURŠÍKOVÁ Vilma; ZAJÍČKOVÁ Lenka; NAVRÁTIL Vladislav; PRYČKOVÁ Jana; SUBEDI Deepak Prasad; JANČA Jan
• Year of publication: 2001
• Type: Article in Proceedings
• Conference: Proceedings of 13th Symposium on Application of Plasma Processes
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Plasma Physics; Thin Solid Films
• Description: The modification of some properties of diamond-like carbon thin films by addition of hexametyldisiloxan was studied.Especially mechanical properties (microhardness) were studied.

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