Publication details

OPTICAL-SPECTRA OF SIXGE1-X ALLOYS

Authors

HUMLÍČEK Josef GARRIGA M. ALONSO M.I. CARDONA M.

Year of publication 1989
Type Article in Periodical
Magazine / Source J. Appl. Phys.
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Description We report pseudodielectric functions of SiGe alloys at room temperature, measured ellipsometrically on polycrystalline samples and single-crystal epitaxial layers, in the 1.8-5,6 eV range. Accurate values of the E1 threshold energies are obtained from numerically differentiated spectra. The measured dependence of E1 on x provides an efficient way to determine the alloy composition x. The spectral and compositional dependence of the optical constants forms a data base for optical studies of Si/SiGe layerede structures.

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