Informace o publikaci
OPTICAL-SPECTRA OF SIXGE1-X ALLOYS
| Autoři | |
|---|---|
| Rok publikování | 1989 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | J. Appl. Phys. |
| Fakulta / Pracoviště MU | |
| Citace | |
| Obor | Fyzika pevných látek a magnetismus |
| Popis | We report pseudodielectric functions of SiGe alloys at room temperature, measured ellipsometrically on polycrystalline samples and single-crystal epitaxial layers, in the 1.8-5,6 eV range. Accurate values of the E1 threshold energies are obtained from numerically differentiated spectra. The measured dependence of E1 on x provides an efficient way to determine the alloy composition x. The spectral and compositional dependence of the optical constants forms a data base for optical studies of Si/SiGe layerede structures. |