Publication details
Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings
| Authors | |
|---|---|
| Year of publication | 2001 |
| Type | Article in Periodical |
| Magazine / Source | J. Phys. D: Appl. Phys. |
| MU Faculty or unit | |
| Citation | |
| Web | http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001 |
| Field | Solid matter physics and magnetism |
| Keywords | reflectivity; xrr; x-uv optics; gratings; w/si; x-ray |
| Description | Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study. |
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