Determination of Mechanical Properties of Thin Films by the Indentation Techniques

• Authors: BURŠÍKOVÁ Vilma; NAVRÁTIL Vladislav
• Year of publication: 2001
• Type: Article in Proceedings
• Conference: New Trends in Physics
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: thin films; mechanical properties; DSI-test; nanoindentation; AFM
• Description: In the present paper the indentation techniques as a powerful thin film characterisation tools will be introduced. The objective of our study is to determine the mechanical properties of a number of different coating-substrate systems by means of both micro and nanoindentation techniques.

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