Publication details
Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion
Authors | |
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Year of publication | 2002 |
Type | Article in Proceedings |
Conference | Conference Proceedings of Inter-Academia 2002 |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | plasma deposition;surface energy; atmospheric discharge |
Description | Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion |
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