Study of mode transition in low pressure capacitive RF discharges in nitrogen

• Authors: ZAJÍČKOVÁ Lenka; DVOŘÁK Pavel; KUDRLE Vít; ŠMÍD Radek
• Year of publication: 2002
• Type: Article in Periodical
• Magazine / Source: Czech. J. Phys.
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: RF discharge; mode transition; sheath

Attached files

• 124_1.pdf

• Description: We have studied the mode transition in low pressure capacitive RF discharges in nitrogen

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