Theoretical analysis of the atomic force microscopy characterization of columnar thin films

• Authors: KLAPETEK Petr; OHLÍDAL Ivan
• Year of publication: 2003
• Type: Article in Periodical
• Magazine / Source: Ultramicroscopy
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: columnar films; atomic force microscopy
• Description: In this paper a theoretical analysis of atomic force microscopy measurements of columnar thin films is presented. Errors originating from tip convoution effects are evaluated.

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