Publication details
Optical diagnostics of atmospheric pressure glow discharge in nitrogen with admixture of organosilicon
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | Proceedings of ICPIG XXVI |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | atmospheric pressure glow dicharge; spectroscopy; nitrogen; organosilicon |
| Description | The atmospheric pressure glow discharge in nitrogen with small admixture of different organosilicon compounds such as hexamethyldisilazane and hexamethyldisiloxane was studied by means of emission spectroscopy. The deposited films were studied by means of indentation techniques. |
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